Phosphoric Acid Electronic Grade

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Zhicheng Chemical Food grade phosphoric acid

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Phosphorus chemical products

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PHOSPHORIC ACID ELECTRONIC GRADE

Chemical Formula:H₃PO₄
Molecular weight: 97.99
CAS No.: 7664-38-2
Content: 75%,81%,85%
Properties: Colorless,odorless,viscous liquid,soluble in water and ethanol.
Uses: Widely used in the microelectronics industry such as ultra-large scale integrated circuits. thin film liquid crystal displays, etc. Mainly used in wet cleaning and wet etching of chips.
Packing: 200LHDPE drum,1000LIBCISO Tank.

	Specifications of Phosphoric Acid Electronic Grade National Standard GB 28159-2011
	No.	Items of Analysis	Unit	E1（LCD grade）	E2 (IC grade)
1		H₃PO₄	%	85-87	85-87
2		H₃PO₃	%	≤0.005	≤0.001
3		NO₃	mg/kg	≤5	≤0.5
4		SO₄	mg/kg	≤10	≤5
5		Cl	mg/kg	≤1	≤0.5
6		Al	µg/kg	≤200	≤50
7		B	µg/kg	-----	≤50
8		Sb	µg/kg	≤3000	≤300
9		As	µg/kg	≤100	≤20
10		Ba	µg/kg	≤100	≤20
11		Cd	µg/kg	≤100	≤20
12		Ca	µg/kg	≤1000	≤50
13		Cr	µg/kg	≤100	≤20
14		Co	µg/kg	≤100	≤20
15		Cu	µg/kg	≤50	≤20
16		Ga	µg/kg	≤100	≤10
17		Au	µg/kg	≤100	≤10
18		Fe	µg/kg	≤300	≤50
19		Pb	µg/kg	≤100	≤20
20		Li	µg/kg	≤100	≤10
21		Mg	µg/kg	≤100	≤20
22		Mn	µg/kg	≤100	≤20
23		Ni	µg/kg	≤100	≤20
24		K	µg/kg	≤100	≤20
25		Ag	µg/kg	≤100	≤20
26		Na	µg/kg	≤500	≤50
27		Sn	µg/kg	------	≤10
28		Sr	µg/kg	≤100	≤20
29		Ti	µg/kg	≤100	≤50
30		Zn	µg/kg	≤100	≤50
31		Granule	µm,pcs/ml	-----	------